Intercomparison in Surface Measurements

Abstract

Innovation, research and development projects that include surface measurements of micro and nanostructures must guarantee the traceability of them. The disciplinary spectrum that includes this type of measurements goes from chemical and biological sciences to the engineering of materials. The traceability is also a requirement for surface roughness in industry. Metrological reliability (ISO10012) presupposes the use of calibrated instruments, traceable patterns, validated measurement procedures and uncertainty balance. These requirements do not apply in microscopy, being a weakness to correct. In this paper we present the results of the intercomparison of surface texture measurements in 2D and 3D patterns with four types of instruments: Contact Roughness, Confocal Microscope, Atomic Force Microscope and Scanning Electron Microscope. The conformity assessments (ISO 17043), through the standardized errors (En) that weigh the systematic effects and their uncertainties, validate the use of microscopes as metrological instruments.