Phase microscopy high resolution profilometry

Abstract

Optical Coherence Tomography (OCT) (Drexler & Fujimoto, 2008) is a technique based on low coherence interferometry and allows obtaining 3D images of surfaces and interior volumes in various materials. This article presents a proposal that aims to develop a modular equipment, as an experimental scheme in modules adaptable to different configurations and applications, to obtain the topography and tomography of materials with high spatial resolution (below the micron). This equipment is based on the technique known as spectral domain phase microscopy (SDPM)(Ding et al., 2013), and although phase analysis is widely used in conventional interferometry, it has only been implemented in combination with OCT in recent years (Larin & Sampson, 2017). in surface topography (Taudt et al., 2020) and material tomography applications (Lan et al., 2017). The first profile measurements with submicron axial spatial resolution on sample surfaces where the optical path difference varies between 30 and 150 nm are presented.